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SET Proceedings

Volume 12, Book 1, 2013, Article 2013.141

SET Proceedings cover

Conference paper

New E-Shaped Cantilever MEMS-Based Piezoelectric Energy Harvester for Low Frequency Applications and Power Optimization

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1School of Electrical and Electronic Engineering, CEDEC, Universiti Sains Malaysia (USM), Pulau Pinang, Malaysia

2Collaborative Microelectronic Design Excellence Center (CEDEC), Universiti Sains Malaysia (USM), Pinang, Malaysia

Published
26 August 2013
Pages
1297-1303
Received
26 August 2013
DOI
10.65582/set.2013.141
Access
Open access, © 2013 Copyright WSSET
Download PDF7 pages · 518 KB

Abstract

In this paper, we propose a model and present the simulation of a new E-shaped MEMS-based piezoelectric energy harvester under ambient vibration excitation using the COVENTORWARE2010 approach. This E-shaped cantilever-based micro-electro-mechanical system (MEMS) energy harvester that operates under ambient excitation in frequencies of 10, 12, and 13 Hz within a base acceleration of 1g produces an output voltage of 0.25 V and power of 25 microwatts at 5kΩ load.

Keywords. Piezoelectric materials; Energy conversion; shaped cantilever; MEMS

© 2013 Copyright WSSET

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